Custom turbo pumped vacuum system
Contact: Paul Goldey
Location: R-G03
1X10E-6 torr capable. NGI3000 Ar etch system. ATX600 RF gun supply with auto-tune one-2 in. Torus gun, and one-1in. Stiletto gun; targets available: Al, Al2O3, Au, C, Cu, Ir, La, Pd, Pt, Ti, W
